Fabrication of Functional Nano-Patterns with Laser
نویسندگان
چکیده
منابع مشابه
Nanoimprint lithography with a focused laser beam for the fabrication of micro-/nano-hybrid patterns†
A simple process which utilizes a 2D stamp based on UV-NIL is proposed. The main idea is to control the cured region on the micrometer scale by using a developable resist. For the conventional UV-NIL process, a collimated UV light is transmitted through the transparent stamp to cure the overall resist as shown in Fig. S1a. However, if the size of the UV light is reduced, the cured region of the...
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ژورنال
عنوان ژورنال: Kobunshi
سال: 2003
ISSN: 0454-1138,2185-9825
DOI: 10.1295/kobunshi.52.771